3

Common-path laser encoder

Year:
2013
Language:
english
File:
PDF, 995 KB
english, 2013
7

Heterodyne common-path grating interferometer with Littrow configuration

Year:
2013
Language:
english
File:
PDF, 1001 KB
english, 2013
16

Sol-Gel Zinc Oxide Humidity Sensors Integrated with a Ring Oscillator Circuit On-a-Chip

Year:
2014
Language:
english
File:
PDF, 2.32 MB
english, 2014
17

Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process

Year:
2009
Language:
english
File:
PDF, 925 KB
english, 2009
23

A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip

Year:
2011
Language:
english
File:
PDF, 1.05 MB
english, 2011
27

Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique

Year:
2009
Language:
english
File:
PDF, 496 KB
english, 2009
29

Micro FET pressure sensor manufactured using CMOS-MEMS technique

Year:
2008
Language:
english
File:
PDF, 1.15 MB
english, 2008
30

Common-path laser planar encoder

Year:
2013
Language:
english
File:
PDF, 2.23 MB
english, 2013